ELLIPSOMETER NULLING - COUPLING AND SETTING UNCERTAINTY

被引：3

作者：

KOTHIYAL, MP

机构：

[1] Indian Institute of Technology, Mechanical Engineering Department, Fine Technics Laboratory, Madras

来源：

APPLIED OPTICS | 1979年 / 18卷 / 07期

关键词：

D O I：

10.1364/AO.18.001019

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

During the nulling of an ellipsometer, coupling is experienced between its adjustable components.In this paper a criterion for coupling is reported, which is useful from a practical point of view.The criterion has been applied to known cases in generalized and conventional ellipsometry.The influence of coupling and detector sensitivity on the setting uncertainty of the adjustable components has been studied.A discussion of the choice of the nulling scheme has been included.© 1979 Optical Society of America.

引用

页码：1019 / 1024

页数：6

共 6 条

[1]

Azzam R. M. A., 1973, Optics Communications, V7, P110, DOI 10.1016/0030-4018(73)90079-5

[2] CHOICE OF COMPENSATOR AZIMUTH AND POSITION IN ELLIPSOMETRY [J].