EPITAXIAL LIFTOFF INGAAS/INP MSM PHOTODETECTORS ON SI

被引：21

作者：

HERRSCHER, M

GRUNDMANN, M

DROGE, E

KOLLAKOWSKI, S

BOTTCHER, EH

BIMBERG, D

机构：

[1] Technische Universität Berlin, Institut für Festkörperphysik I, 10623 Berlin

来源：

ELECTRONICS LETTERS | 1995年 / 31卷 / 16期

关键词：

EPITAXIAL LIFT-OFF; GALLIUM INDIUM ARSENIDE; INDIUM PHOSPHIDE; METAL-SEMICONDUCTOR-METAL STRUCTURES; PHOTODETECTORS; SILICON;

D O I：

10.1049/el:19950910

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

InGaAs:Fe/InP:Fe metal-semiconductor-metal (MSM) photo-detectors for the long wavelength region were transferred by epitaxial liftoff (ELO) techniques onto an Si substrate. The transferred detectors, with a finger spacing and width of 1.5 and 1.0 mu m, respectively, showed no deterioration in device performance. A fast impulse response with an FWHM of 23 ps and an external quantum efficiency of 48% was measured at a 7V bias and 1.3 mu m wavelength. The leakage current was 250nA at a 7V bias.

引用

页码：1383 / 1384

页数：2

共 8 条

[1] CHAN WK, 1992, 1ST P INT S SEM WAF, P123
[2] EPITAXIAL LIFT-OFF AND ITS APPLICATIONS
DEMEESTER, P
POLLENTIER, I
DEDOBBELAERE, P
BRYS, C
VANDAELE, P
[J]. SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1993, 8 (06) : 1124 - 1135
[3] LARGE-AREA LOW-CAPACITANCE INP/INGAAS MSM PHOTODETECTORS FOR HIGH-SPEED OPERATION UNDER FRONT AND REAR ILLUMINATION
HIERONYMI, F
BOTTCHER, EH
DROGE, E
KUHL, D
KOLLAKOWSKI, S
BIMBERG, D
[J]. ELECTRONICS LETTERS, 1994, 30 (15) : 1247 - 1248
[4] FULLY PASSIVATED AR COATED INP/INGAAS MSM PHOTODETECTORS
KOLLAKOWSKI, S
SCHADE, U
BOTTCHER, EH
BIMBERG, D
[J]. IEEE PHOTONICS TECHNOLOGY LETTERS, 1994, 6 (11) : 1324 - 1326
[5] INDUCTIVE BANDWIDTH ENHANCEMENT OF SUB-MU-M INALAS-INGAAS MSM PHOTODETECTORS
KUHL, D
BOTTCHER, EH
HIERONYMI, F
DROGE, E
BIMBERG, D
[J]. IEEE PHOTONICS TECHNOLOGY LETTERS, 1995, 7 (04) : 421 - 423
[6] HIGH-SPEED INP/GAINAS PHOTODIODE ON SAPPHIRE SUBSTRATE
SCHUMACHER, H
GMITTER, TJ
LEBLANC, HP
BHAT, R
YABLONOVITCH, E
KOZA, MA
[J]. ELECTRONICS LETTERS, 1989, 25 (24) : 1653 - 1654
[7] Treitinger L., 1993, ECOC '93. 19th European Conference on Optical Communication Proceedings, P76
[8] UMBACH A, IN PRESS ECOC 95

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