DIELECTRIC SEMICONDUCTOR INTERFACES

被引：11
|
作者：
WIEDER, HH
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1993年 / 11卷 / 04期
关键词：
D O I：
10.1116/1.586937
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A retrospective and chronological review will be presented of the scientific and technological evolution of metal/insulator/semiconductor structures with emphasis on the interfaces between compound semiconductors, homomorphic, heteromorphic, and heterojunction quasi-insulators. The Conference on the Physics and Chemistry of Semiconductor Interfaces has provided for the past 20 years a forum for the synthesis of worldwide research on the nature of dielectric/semiconductor interfaces. The current status of such research and some of the many unresolved fundamental and applications-oriented issues that remain to be explored will be introduced, as well.
引用
收藏
页码：1331 / 1335
页数：5
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