LASER-INDUCED UNZIPPING - A THERMAL ROUTE TO POLYMER ABLATION

被引:32
作者
BLANCHET, GB
FINCHER, CR
机构
[1] E. I. DuPont De Nemours, Central Research Department, Wilmington
关键词
D O I
10.1063/1.112038
中图分类号
O59 [应用物理学];
学科分类号
摘要
The data presented here show that polytetrafluoroethylene (PTFE) and polymethylmethacrylate (PMMA) can be ablated by the evaporation of solid polymer targets with a pulsed ultraviolet laser. In situ measurements of the plume composition show that the products emitted under laser irradiation are primarily monomer and other species resulting from energetic collisions within the plasma. The similarities between the ablative and pyrolisis mass spectra suggest that ablation of PTFE and PMMA occur through a laser induced pyrolitic decomposition.
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页码:1311 / 1313
页数:3
相关论文
共 22 条
[1]   DIRECT ETCHING OF POLYMERIC MATERIALS USING A XECL LASER [J].
ANDREW, JE ;
DYER, PE ;
FORSTER, D ;
KEY, PH .
APPLIED PHYSICS LETTERS, 1983, 43 (08) :717-719
[2]  
[Anonymous], 1975, POLYM HDB
[3]   DEPOSITION OF AMORPHOUS FLUOROPOLYMERS THIN-FILMS BY LASER ABLATION [J].
BLANCHET, GB .
APPLIED PHYSICS LETTERS, 1993, 62 (05) :479-481
[4]   DEPOSITION OF POLYTETRAFLUOROETHYLENE FILMS BY LASER ABLATION [J].
BLANCHET, GB ;
SHAH, SI .
APPLIED PHYSICS LETTERS, 1993, 62 (09) :1026-1028
[5]  
BRANNON JH, 1985, J APPL PHYS, V58, P2037
[6]   SELF-DEVELOPING RESIST WITH SUBMICROMETER RESOLUTION AND PROCESSING STABILITY [J].
GEIS, MW ;
RANDALL, JN ;
DEUTSCH, TF ;
DEGRAFF, PD ;
KROHN, KE ;
STERN, LA .
APPLIED PHYSICS LETTERS, 1983, 43 (01) :74-76
[7]   CALORIMETRIC BEHAVIOR OF METHACRYLIC POLYMERS [J].
GRISKEY, RG ;
HUBBELL, DO .
JOURNAL OF APPLIED POLYMER SCIENCE, 1968, 12 (04) :853-&
[8]   FORMATION OF POLYMER-FILMS BY PULSED LASER EVAPORATION [J].
HANSEN, SG ;
ROBITAILLE, TE .
APPLIED PHYSICS LETTERS, 1988, 52 (01) :81-83
[9]   THERMAL CAPACITY OF POLYACRYLATES AND POLYMETHACRYLATES IN TEMPERATURE RANGE OF -180 TO +160 DEGREES C [J].
HOFFMANN, R ;
KNAPPE, W .
KOLLOID-ZEITSCHRIFT AND ZEITSCHRIFT FUR POLYMERE, 1971, 247 (1-2) :763-&
[10]  
KUPER S, 1990, J PHYS CHEM-US, V94, P7514