A COMPARATIVE-STUDY OF EVAPORATED AL2O3, SIO2 AND SIO2.AL2O3 THIN-FILMS

被引：12
作者：
VANFLETEREN, J [1 ]
VANCALSTER, A [1 ]
机构：
[1] STATE UNIV GHENT,ELECTR LAB,B-9000 GHENT,BELGIUM
来源：
THIN SOLID FILMS | 1986年 / 139卷 / 01期
关键词：
ELLIPSOMETRY - REFRACTIVE INDEX;
D O I：
10.1016/0040-6090(86)90051-9
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：89 / 94
页数：6
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