VAPOR-DEPOSITION OF DIAMOND PARTICLES FROM METHANE

被引：548

作者：

MATSUMOTO, S

SATO, Y

KAMO, M

SETAKA, N

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1982年 / 21卷 / 04期

关键词：

D O I：

10.1143/JJAP.21.L183

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：L183 / L185

页数：3

共 14 条

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[10] ION-BEAM-DEPOSITED POLYCRYSTALLINE DIAMONDLIKE FILMS [J].

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