1 GB/S SI HIGH QUANTUM EFFICIENCY MONOLITHICALLY INTEGRABLE LAMBDA=0.88 MU-M DETECTOR

被引：19

作者：

LEVINE, BF

WYNN, JD

KLEMENS, FP

SARUSI, G

机构：

[1] ATandT Bell Laboratories, Murray Hill

来源：

APPLIED PHYSICS LETTERS | 1995年 / 66卷 / 22期

关键词：

D O I：

10.1063/1.114251

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We propose and demonstrate a 1 Gb/s high quantum efficiency Si MSM metal-semiconductor-metal detector which is complementary metal-oxide semiconductor compatible. The detector absorbs over 50% of the light entering the active layer at a wavelength of λ=0.88 μm. © 1995 American Institute of Physics.

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页码：2984 / 2986

页数：3

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