DIRECT DETERMINATION OF ABSOLUTE MONOLAYER COVERAGES OF CHEMISORBED C2H2 AND C2H4 ON SI(100)

被引:149
作者
CHENG, CC
WALLACE, RM
TAYLOR, PA
CHOYKE, WJ
YATES, JT
机构
[1] Surface Science Center, Department of Chemistry, University of Pittsburgh, Pittsburgh
关键词
D O I
10.1063/1.345326
中图分类号
O59 [应用物理学];
学科分类号
摘要
A convenient kinetic uptake method has been employed to determine the absolute saturation monolayer coverage of C2H2 and C 2H4 on a Si(100)(2×1) surface. Such measurements are important for postulating the structure of the chemisorbed hydrocarbon species on this surface. The saturation surface coverage for both chemisorbed molecules at 105 K is 2.5(±0.2)×1014 molecules/cm 2. This number is consistent with 1 hydrocarbon molecule per Si dimer site at monolayer coverage when the role of surface defects on Si(100) is considered. A di-σ bonding model for both molecules is proposed at saturation coverage.
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页码:3693 / 3699
页数:7
相关论文
共 23 条
[1]  
ALBERT MR, 1987, SURFACE SCI GUIDE OR, P194
[2]   SI(100) SURFACE RECONSTRUCTION - SPECTROSCOPIC SELECTION OF A STRUCTURAL MODEL [J].
APPELBAUM, JA ;
BARAFF, GA ;
HAMANN, DR .
PHYSICAL REVIEW LETTERS, 1975, 35 (11) :729-732
[3]   SI (100) SURFACE .3. SURFACE RECONSTRUCTION [J].
APPELBAUM, JA ;
BARAFF, GA ;
HAMANN, DR .
PHYSICAL REVIEW B, 1976, 14 (02) :588-601
[4]   THEORY OF RECONSTRUCTION INDUCED SUBSURFACE STRAIN - APPLICATION TO SI(100) [J].
APPELBAUM, JA ;
HAMANN, DR .
SURFACE SCIENCE, 1978, 74 (01) :21-33
[5]   CHEMICAL ACTIVITY OF THE C=C DOUBLE-BOND ON SILICON SURFACES [J].
BOZACK, MJ ;
TAYLOR, PA ;
CHOYKE, WJ ;
YATES, JT .
SURFACE SCIENCE, 1986, 177 (01) :L933-L937
[6]   DEFECT-ENHANCED AND ELECTRON-ENHANCED CHEMISTRY AT SILICON SURFACES - REACTIVITY AND THERMAL-DESORPTION OF PROPYLENE ON SI(100)-(2X1) [J].
BOZACK, MJ ;
CHOYKE, WJ ;
MUEHLHOFF, L ;
YATES, JT .
SURFACE SCIENCE, 1986, 176 (03) :547-566
[7]   METHODS IN SEMICONDUCTOR SURFACE-CHEMISTRY [J].
BOZACK, MJ ;
MUEHLHOFF, L ;
RUSSELL, JN ;
CHOYKE, WJ ;
YATES, JT .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (01) :1-8
[8]   DESIGN CONSIDERATIONS FOR SIMPLE GAS DOSERS IN SURFACE SCIENCE APPLICATIONS [J].
CAMPBELL, CT ;
VALONE, SM .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (02) :408-411
[9]   THE ADSORPTION AND DECOMPOSITION OF NH3 ON SI(100) - DETECTION OF THE NH2(A) SPECIES [J].
DRESSER, MJ ;
TAYLOR, PA ;
WALLACE, RM ;
CHOYKE, WJ ;
YATES, JT .
SURFACE SCIENCE, 1989, 218 (01) :75-107
[10]  
EASTMAN DE, 1980, J VAC SCI TECHNOL, V17, P492, DOI 10.1116/1.570492