ALUMINUM DOPED ZINC-OXIDE THIN-FILMS DEPOSITED BY ION-BEAM SPUTTERING

被引：23

作者：

RUTH, M ^{[1
]}

TUTTLE, J ^{[1
]}

GORAL, J ^{[1
]}

NOUFI, R ^{[1
]}

机构：

[1] SOLAR ENERGY RES INST,1617 COLE BLVD,GOLDEN,CO 80401

来源：

JOURNAL OF CRYSTAL GROWTH | 1989年 / 96卷 / 02期

关键词：

D O I：

10.1016/0022-0248(89)90534-4

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

页码：363 / 368

页数：6

共 13 条

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[4]

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[10] ELECTRICAL AND OPTICAL-PROPERTIES OF ZINC-OXIDE THIN-FILMS PREPARED BY RF MAGNETRON SPUTTERING FOR TRANSPARENT ELECTRODE APPLICATIONS [J].

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