EQUILIBRIUM TOPOGRAPHY OF SPUTTERED AMORPHOUS SOLIDS .3. COMPUTER SIMULATION

被引：85

作者：

CATANA, C

CARTER, G

COLLIGON, JS

机构：

来源：

JOURNAL OF MATERIALS SCIENCE | 1972年 / 7卷 / 04期

关键词：

D O I：

10.1007/BF02403410

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

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页码：467 / &

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共 5 条

[1] EQUILIBRIUM TOPOGRAPHY OF SPUTTERED AMORPHOUS SOLIDS .2. [J].

CARTER, G ;

COLLIGON, JS ;

NOBES, MJ .

JOURNAL OF MATERIALS SCIENCE, 1971, 6 (02) :115-&

[2]

MARINKOVIC V, 1964, 3 P EUR REG C EL MIC, P311

[3] EQUILIBRIUM TOPOGRAPHY OF SPUTTERED AMORPHOUS SOLIDS [J].

NOBES, MJ ;

COLLIGON, JS ;

CARTER, G .

JOURNAL OF MATERIALS SCIENCE, 1969, 4 (08) :730-&

[4] MICROTOPOGRAPHY OF SURFACES ERODED BY ION-BOMBARDMENT [J].

STEWART, ADG ;

THOMPSON, MW .

JOURNAL OF MATERIALS SCIENCE, 1969, 4 (01) :56-&

[5] INFLUENCE OF THE ANGLE OF INCIDENCE ON SPUTTERING YIELDS [J].

WEHNER, G .

JOURNAL OF APPLIED PHYSICS, 1959, 30 (11) :1762-1765