ANALYTICAL MODEL FOR OBLIQUE ION REFLECTION AT THE SI SURFACE

被引：10

作者：

MIZUNO, T

HIGUCHI, T

ISHIUCHI, H

MATSUMOTO, Y

SAITOH, Y

SAWADA, S

SHINOZAKI, S

机构：

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 1988年 / 35卷 / 12期

关键词：

D O I：

10.1109/16.8808

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：2323 / 2327

页数：5

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