EFFECT OF OXYGEN PLASMA ANNEALING ON SUPERCONDUCTING PROPERTIES OF BI2(SR,CA)3CU2OX AND YBA2CU3O7-DELTA THIN-FILMS

被引：6
作者：
YOSHITAKE, T
MIURA, S
FUJITA, J
SHOHATA, N
IGARASHI, H
SATOH, T
SEKIGUCHI, A
KATOH, K
机构：
[1] NEC CORP LTD,RESOURCES & ENVIRONM PROTECT RES LABS,KAWASAKI,KANAGAWA 213,JAPAN
[2] ANELVA CORP,TOKYO 183,JAPAN
来源：
APPLIED PHYSICS LETTERS | 1990年 / 56卷 / 06期
关键词：
D O I：
10.1063/1.103302
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Thin films of the Bi2(Sr,Ca)3Cu2O x and YBa2Cu3O7-δ system were annealed at 400°C in a high-density oxygen plasma and its effect on superconducting properties was investigated. After being annealed in the oxygen plasma, their superconducting transition temperatures decreased by about 10 K and 2 K, respectively, and the c-axis lattice constants of these films were also found to decrease as a result of the annealing in the oxygen plasma. These results suggest that excessive oxygen incorporated into the films by the annealing in the oxygen plasma caused the excessive hole carriers, which deteriorated the superconducting transition temperatures of these films.
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收藏
页码：575 / 577
页数：3
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