A HEAVY-ION IMPLANTING FACILITY AT THE CHIANG-MAI-UNIVERSITY

被引：7

作者：

SUWANNAKACHORN, D ^{[1
]}

BOONYAWAN, D ^{[1
]}

GREEN, JP ^{[1
]}

AUMKAEW, S ^{[1
]}

THONGLEURM, C ^{[1
]}

VICHAISIRIMONGKOL, P ^{[1
]}

VILAITHONG, T ^{[1
]}

机构：

[1] CHIANG MAI UNIV,INST SCI & TECHNOL RES & DEV,CHIANG MAI 50002,THAILAND

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1994年 / 89卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(94)95199-3

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Nitrogen ion implantation is widely used to improve the wear and corrosion resistance of metals and alloys. Different kinds of ions, including metal and heavier ions can be used for this purpose. The proposed ion implanter as a 0-degrees and a 45-degrees-beam line. The 0-degrees-beam line has been installed and tested by using an RF source with an ion energy of about 140 keV. The nitrogen beam current is about 200 muA at the target position. The beam can be magnetically swept to cover a 10 cm x 10 cm target area. Preliminary tests with an ion dose of about 10(17) ions/cm2 improved the hardness of stainless steel and aluminium samples. The 45-degrees-beam line and the analyzing magnet are under construction. When this will be completed, the present RF ion source will be replaced by a Danfysik 910 ion source which can be used for producing metal and heavier ions.

引用

页码：354 / 356

页数：3

共 6 条

[1] REDUCED WEAR AND CLADDING PERFORMANCES OF SEVERAL MATERIALS BY NITROGEN ION-IMPLANTATION [J].

BRAUN, M .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1991, 59 :914-919

[2]

COLMAN J, 1986, TRANSPORT CODE IBM P

[3] A MULTIPURPOSE IMPLANTER WITH VARIOUS TARGET CHAMBERS FOR BASIC STUDIES ON THE INFLUENCE OF ION-BOMBARDMENT ON MATERIAL PROPERTIES [J].

FRECH, G ;

ENSINGER, W ;

MULLER, H ;

HANS, M ;

WOLF, GK .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1992, 68 (1-4) :402-407

[4]

HIRVONEN JK, 1989, MAT SCI ENG A-STRUCT, V116, P107

[5]

NELSON A, 1993, COMMUNICATION

[6]

ROTBERG V, 1992, COMMUNICATION

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