ETCHING OF AN AL SOLID BY SICL4 MOLECULES AT 600 EV

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作者：
PARK, SC
CHO, CH
RHEE, CH
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BULLETIN OF THE KOREAN CHEMICAL SOCIETY | 1990年 / 11卷 / 01期
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O6 [化学];
学科分类号：
0703 ;
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页码：1 / 7
页数：7
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