SENSITIVITY AND MODE SPECTRUM OF A FREQUENCY-OUTPUT SILICON PRESSURE SENSOR

被引：12
作者：
ANDRES, MV [1 ]
FOULDS, KWH [1 ]
TUDOR, MJ [1 ]
机构：
[1] UNIV SURREY,DEPT PHYS,GUILDFORD GU2 5XH,SURREY,ENGLAND
来源：
SENSORS AND ACTUATORS | 1988年 / 15卷 / 04期
关键词：
D O I：
10.1016/0250-6874(88)81510-5
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
8
引用
收藏
页码：417 / 426
页数：10
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