EFFECT OF HEATING RATE ON THE SINTERING OF TITANIUM-DIOXIDE THIN-FILMS - COMPETITION BETWEEN DENSIFICATION AND CRYSTALLIZATION

被引：55
作者：
KEDDIE, JL
GIANNELIS, EP
机构：
[1] Department of Materials Science and Engineering, Cornell University, Ithaca, New York
来源：
JOURNAL OF THE AMERICAN CERAMIC SOCIETY | 1991年 / 74卷 / 10期
关键词：
D O I：
10.1111/j.1151-2916.1991.tb06818.x
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Sintering of sol-gel-derived TiO2 thin films was studied as a function of heating rate by ion-beam analysis, X-ray diffraction, and ellipsometry. The degree of densification increases with increasing heating rate. Densest films containing the lowest amount of hydroxyls are obtained using rapid thermal annealing. The results are rationalized in terms of a competition between densification and crystallization.
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页码：2669 / 2671
页数：3
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