EFFECT OF HEATING RATE ON THE SINTERING OF TITANIUM-DIOXIDE THIN-FILMS - COMPETITION BETWEEN DENSIFICATION AND CRYSTALLIZATION

被引：55
作者：
KEDDIE, JL
GIANNELIS, EP
机构：
[1] Department of Materials Science and Engineering, Cornell University, Ithaca, New York
来源：
JOURNAL OF THE AMERICAN CERAMIC SOCIETY | 1991年 / 74卷 / 10期
关键词：
D O I：
10.1111/j.1151-2916.1991.tb06818.x
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Sintering of sol-gel-derived TiO2 thin films was studied as a function of heating rate by ion-beam analysis, X-ray diffraction, and ellipsometry. The degree of densification increases with increasing heating rate. Densest films containing the lowest amount of hydroxyls are obtained using rapid thermal annealing. The results are rationalized in terms of a competition between densification and crystallization.
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页码：2669 / 2671
页数：3
相关论文
共 16 条
  • [1] Brinker C. J., 1990, SOL GEL SCI
  • [2] Cullity B. D., 1978, ELEMENTS XRAY DIFFRA, P284
  • [3] Feldman LC., 1986, FUNDAMENTALS SURFACE, P59
  • [4] HARRIS MT, 1989, J NONCRYST SOLIDS, V103, P49
  • [5] ION-BEAM ANALYSIS OF SILICA SOL-GEL FILMS - STRUCTURAL AND COMPOSITIONAL EVOLUTION
    KEDDIE, JL
    GIANNELIS, EP
    [J]. JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1990, 73 (10) : 3106 - 3109
  • [6] KEDDIE JL, 1990, BETTER CERAMICS CHEM, V4, P425
  • [7] CHARACTERIZATION OF OPTICAL COATINGS WITH BACKSCATTERING SPECTROMETRY
    LEAVITT, JA
    MCINTYRE, LC
    ASHBAUGH, MD
    DEZFOULYARJOMANDY, B
    ODER, JG
    [J]. APPLIED OPTICS, 1989, 28 (14): : 2762 - 2764
  • [8] CHEMICAL MODIFICATION OF METAL ALKOXIDES BY SOLVENTS - A WAY TO CONTROL SOL-GEL CHEMISTRY
    NABAVI, M
    DOEUFF, S
    SANCHEZ, C
    LIVAGE, J
    [J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1990, 121 (1-3) : 31 - 34
  • [9] EFFECT OF THE HEATING RATE ON THE RELATIVE RATES OF SINTERING AND CRYSTALLIZATION IN GLASS
    PANDA, PC
    MOBLEY, WM
    RAJ, R
    [J]. JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1989, 72 (12) : 2361 - 2364
  • [10] SINTERING AND CRYSTALLIZATION OF GLASS AT CONSTANT HEATING RATES
    PANDA, PC
    RAJ, R
    [J]. JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1989, 72 (08) : 1564 - 1566
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