FABRICATION OF KINOFORM STRUCTURES FOR OPTICAL COMPUTING

被引：37

作者：

GALE, MT ^{[1
]}

LANG, GK ^{[1
]}

RAYNOR, JM ^{[1
]}

SCHUTZ, H ^{[1
]}

PRONGUE, D ^{[1
]}

机构：

[1] UNIV NEUCHATEL,INST MICROTECHNOL,CH-2000 NEUCHATEL,SWITZERLAND

来源：

APPLIED OPTICS | 1992年 / 31卷 / 26期

关键词：

KINOFORMS; MICROOPTICS FABRICATION; OPTICAL COMPUTING;

D O I：

10.1364/AO.31.005712

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The fabrication of kinoform micro-optical elements for applications in optical computing is described. The elements are recorded as continuous microrelief structures by programmable laser beam writing in photoresist with a computer-controlled precision xy stage and a modulated, focused laser beam. Kinoform structures can be programmed to any desired profile that is required for reproducing complex, optimized structures that are found by computer design techniques.

引用

页码：5712 / 5715

页数：4

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