FABRICATION OF KINOFORM STRUCTURES FOR OPTICAL COMPUTING

被引：37

作者：

GALE, MT ^{[1
]}

LANG, GK ^{[1
]}

RAYNOR, JM ^{[1
]}

SCHUTZ, H ^{[1
]}

PRONGUE, D ^{[1
]}

机构：

[1] UNIV NEUCHATEL,INST MICROTECHNOL,CH-2000 NEUCHATEL,SWITZERLAND

来源：

APPLIED OPTICS | 1992年 / 31卷 / 26期

关键词：

KINOFORMS; MICROOPTICS FABRICATION; OPTICAL COMPUTING;

D O I：

10.1364/AO.31.005712

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The fabrication of kinoform micro-optical elements for applications in optical computing is described. The elements are recorded as continuous microrelief structures by programmable laser beam writing in photoresist with a computer-controlled precision xy stage and a modulated, focused laser beam. Kinoform structures can be programmed to any desired profile that is required for reproducing complex, optimized structures that are found by computer design techniques.

引用

页码：5712 / 5715

页数：4

共 8 条

[1] FAN-OUT GRATINGS WITH A CONTINUOUS PROFILE
DALY, D
HODSON, SM
HUTLEY, MC
[J]. OPTICS COMMUNICATIONS, 1991, 82 (3-4) : 183 - 187
[2] Gale M. T., 1986, Proceedings of the SPIE - The International Society for Optical Engineering, V679, P165, DOI 10.1117/12.939582
[3] GALE MT, 1983, P SOC PHOTO-OPT INST, V398, P347, DOI 10.1117/12.935397
[4] GALE MT, 1991, P SOC PHOTO-OPT INS, V1506, P65, DOI 10.1117/12.45959
[5] LASER-BEAM LITHOGRAPHED MICRO-FRESNEL LENSES
HARUNA, M
TAKAHASHI, M
WAKAHAYASHI, K
NISHIHARA, H
[J]. APPLIED OPTICS, 1990, 29 (34): : 5120 - 5126
[6] DESIGN AND FABRICATION OF HIGHLY EFFICIENT FAN-OUT ELEMENTS
HERZIG, HP
PRONGUE, D
DANDLIKER, R
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1990, 29 (07): : L1307 - L1309
[7] PRONGUE D, IN PRESS APPL OPT
[8] Sandercock J.R., 1987, P SOC PHOTO-OPT INS, V732, P157, DOI [10.1117/12.937916, DOI 10.1117/12.937916]

← 1 →