OBSERVATION OF HCL- AND HF-TREATED GAAS-SURFACES BY MEASURING CONTACT ANGLES OF WATER DROPLETS

被引:19
作者
MATSUSHITA, K
MIYAZAKI, S
OKUYAMA, S
KUMAGAI, Y
机构
[1] Department of Electrical and Information Engineering, Yamagata University, Yonezawa
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1994年 / 33卷 / 08期
关键词
CONTACT ANGLE; WATER DROPLET; GAAS; HCL; HF; SURFACE TREATMENT;
D O I
10.1143/JJAP.33.4576
中图分类号
O59 [应用物理学];
学科分类号
摘要
A GaAs surface chemically treated with hydrochloric acid (HCl) or hydrofluoric acid (HF) has been characterized by measurements of the contact angle between the surface and a water droplet on it in air. The contact angle measured from the GaAs samples dipped into water shows the formation of a thin surface layer on the GaAs surface and the subsequent removal of the layer upon chemical treatment with HCl or HF solution. Annealing in nitrogen atmosphere is shown to be effective in stabilizing the surface against water.
引用
收藏
页码:4576 / 4580
页数:5
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