PREPARATION OF NITRIDE FILMS BY AR+-ION BOMBARDMENT OF METALS IN NITROGEN ATMOSPHERE

被引：59

作者：

BABA, Y ^{[1
]}

SASAKI, TA ^{[1
]}

TAKANO, I ^{[1
]}

机构：

[1] KOGAKUIN UNIV, DEPT ELECT ENGN, TOKYO 160, JAPAN

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1988年 / 6卷 / 05期

关键词：

D O I：

10.1116/1.575456

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2945 / 2948

页数：4

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