SURFACE SEGREGATION MECHANISM DURING TWO-DIMENSIONAL EPITAXIAL-GROWTH - THE CASE OF DOPANTS IN SI AND GAAS MOLECULAR-BEAM EPITAXY

被引:33
作者
ANDRIEU, S [1 ]
DAVITAYA, FA [1 ]
PFISTER, JC [1 ]
机构
[1] CTR NATL ETUD TELECOMMUN,F-38243 MEYLAN,FRANCE
关键词
D O I
10.1063/1.342752
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:2681 / 2687
页数:7
相关论文
共 45 条
[1]   INFLUENCE OF GROWTH-CONDITIONS ON TIN INCORPORATION IN GAAS GROWN BY MOLECULAR-BEAM EPITAXY [J].
ALEXANDRE, F ;
RAISIN, C ;
ABDALLA, MI ;
BRENAC, A ;
MASSON, JM .
JOURNAL OF APPLIED PHYSICS, 1980, 51 (08) :4296-4304
[2]   BORON DOPING OF SI MOLECULAR-BEAM EPITAXY LAYERS - A NEW HIGH-TEMPERATURE EFFUSION CELL [J].
ANDRIEU, S ;
CHROBOCZEK, JA ;
CAMPIDELLI, Y ;
ANDRE, E ;
DAVITAYA, FA .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (03) :835-841
[3]   MODEL-CALCULATIONS FOR ACCELERATED AS ION DOPING OF SI DURING MOLECULAR-BEAM EPITAXY [J].
BAJOR, G ;
GREENE, JE .
JOURNAL OF APPLIED PHYSICS, 1983, 54 (03) :1579-1582
[4]   THE INTERACTION OF SB4 MOLECULAR-BEAMS WITH SI(100) SURFACES - MODULATED-BEAM MASS-SPECTROMETRY AND THERMALLY STIMULATED DESORPTION STUDIES [J].
BARNETT, SA ;
WINTERS, HF ;
GREENE, JE .
SURFACE SCIENCE, 1986, 165 (2-3) :303-326
[5]   SI MOLECULAR-BEAM EPITAXY - A MODEL FOR TEMPERATURE-DEPENDENT INCORPORATION PROBABILITIES AND DEPTH DISTRIBUTIONS OF DOPANTS EXHIBITING STRONG SURFACE SEGREGATION [J].
BARNETT, SA ;
GREENE, JE .
SURFACE SCIENCE, 1985, 151 (01) :67-90
[6]   ARBITRARY DOPING PROFILES PRODUCED BY SB-DOPED SI MBE [J].
BEAN, JC .
APPLIED PHYSICS LETTERS, 1978, 33 (07) :654-656
[7]   ACCEPTOR DOPANTS IN SILICON MOLECULAR-BEAM EPITAXY [J].
BECKER, GE ;
BEAN, JC .
JOURNAL OF APPLIED PHYSICS, 1977, 48 (08) :3395-3399
[8]   THE GROWTH OF CRYSTALS AND THE EQUILIBRIUM STRUCTURE OF THEIR SURFACES [J].
BURTON, WK ;
CABRERA, N ;
FRANK, FC .
PHILOSOPHICAL TRANSACTIONS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1951, 243 (866) :299-358
[9]   MAGNESIUM-DOPED GAAS AND ALXGA1-XAS BY MOLECULAR-BEAM EPITAXY [J].
CHO, AY ;
PANISH, MB .
JOURNAL OF APPLIED PHYSICS, 1972, 43 (12) :5118-5123
[10]  
DAVITAYA FA, 1987, UNPUB 4TH EUR WORKSH