ELECTRICALLY ACTIVE PARAMAGNETIC CENTERS AT SI-SIO2 INTERFACES

被引:3
作者
MENDZ, G
HANEMAN, D
机构
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1981年 / 26卷 / 02期
关键词
D O I
10.1007/BF00616654
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:87 / 92
页数:6
相关论文
共 34 条
[21]  
REVESZ AG, 1978, PHYSICS SIO2 ITS INT, P222
[22]   CHEMICAL ETCHING OF SILICON .2. THE SYSTEM HF, HNO3, H2O, AND HC2H3O2 [J].
ROBBINS, H ;
SCHWARTZ, B .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1960, 107 (02) :108-111
[23]   CHEMICAL ETCHING OF SILICON .1. THE SYSTEM HF,HNO3, AND H2O [J].
ROBBINS, H ;
SCHWARTZ, B .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1959, 106 (06) :505-508
[24]   LOW-TEMPERATURE OXIDATION OF SILICON STUDIED BY PHOTOSENSITIVE ESR AND AUGER-ELECTRON SPECTROSCOPY [J].
RUZYLLO, J ;
SHIOTA, I ;
MIYAMOTO, N ;
NISHIZAWA, J .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1976, 123 (01) :26-29
[25]   CHEMICAL ETCHING OF SILICON .3. A TEMPERATURE STUDY IN THE ACID SYSTEM [J].
SCHWARTZ, B ;
ROBBINS, H .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1961, 108 (04) :365-372
[26]  
SHIOTA I, 1973, SURF SCI, V36, P424
[27]  
SHIOTA I, 1979, SOLID FILMS SURFACES, P649
[28]  
SHIOTA I, 1974, JPN J APPL PHYS PT 2, V2, P417
[29]  
STICKLER R, 1962, J ELECTROCHEM SOC, V109, P734
[30]  
SVENSSON CM, 1978, PHYSICS SIO2 ITS INT, P328