INFILTRATION AND COATING OF THE POROUS CARBONACEOUS BODIES BY CHEMICAL VAPOR-DEPOSITION

被引:6
作者
DIMITRIJEVIC, ST
机构
关键词
INFILTRATION; COATING; POROUS CARBONACEOUS SUBSTRATES; CHEMICAL VAPOR DEPOSITION; EMPIRICAL MODELIZATION;
D O I
10.1016/0008-6223(91)90127-5
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
In this article, an empirical modelisation of infiltration and of simultaneous infiltration and coating of the porous carbonaceous substrates by chemical vapour deposition is presented. The problem was stated concentrating on the neccessity of distinguishing the pores filling from pores closing, and trying to avoid the mechanisms of the gas-phase reactions. The set of equations describing the stated problem was formulated and applied to different types of substrates and different deposits. The obtained results showed that the infiltration and coating of the porous substrates can be described by the formulated set of equations, and that they can be used for estimation of the relevant kinetics parameter values. Moreover, these values can be used for prediction of the evolution of some properties of the obtained material (e.g., densities, density-porosity relationship) as a function of deposition time. The calculated values showed good agreement with the experimental ones. The estimation of the values of rate constants enabled the explanation of the behaviour of closed porosity formation, deposition within the pores, and coating of the substrates for different systems.
引用
收藏
页码:605 / 611
页数:7
相关论文
共 50 条
[21]   PREPARATION OF ULTRAFINE IRON PARTICLES BY CHEMICAL VAPOR-DEPOSITION OF FE(CO)5 [J].
SAWADA, Y ;
KAGEYAMA, Y ;
IWATA, M .
KAGAKU KOGAKU RONBUNSHU, 1991, 17 (06) :1074-1079
[22]   CONTINUOUS SYNTHESIS OF ULTRAFINE IRON PARTICLES BY CHEMICAL VAPOR-DEPOSITION OF FE(CO) [J].
SAWADA, Y ;
KAGEYAMA, Y ;
IWATA, M .
KAGAKU KOGAKU RONBUNSHU, 1992, 18 (03) :267-273
[23]   Progress in coating ultrafine particles using chemical vapor deposition in fluidized bed reactors [J].
Hong, RY ;
Li, HZ .
PROGRESS IN NATURAL SCIENCE, 1996, 6 (03) :269-276
[24]   Progress in coating ultraflne particles using chemical vapor deposition in fluidized bed reactors [J].
洪若瑜 ;
李洪钟 .
ProgressinNaturalScience, 1996, (03) :15-22
[25]   NUMERICAL-ANALYSIS OF DEPOSITION RATES OF ZIRCONIUM THIN-FILMS BY THERMAL CHEMICAL VAPOR-DEPOSITION [J].
NAKAMURA, S ;
HAYASHI, Y ;
KAWANISHI, T ;
KOMATSU, T ;
TAKEUCHI, M .
NIPPON SERAMIKKUSU KYOKAI GAKUJUTSU RONBUNSHI-JOURNAL OF THE CERAMIC SOCIETY OF JAPAN, 1992, 100 (03) :266-271
[26]   Phase composition and morphology of TaC coating on carbon fibers by chemical vapor infiltration [J].
Chen, Zhao-ke ;
Xiong, Xiang ;
Huang, Bai-yun ;
Li, Guo-dong ;
Zheng, Feng ;
Xiao, Peng ;
Zhang, Hong-bo ;
Yin, Jian .
THIN SOLID FILMS, 2008, 516 (23) :8248-8254
[27]   SI-BASED COATINGS ON IRON BY LOW-PRESSURE CHEMICAL VAPOR-DEPOSITION OF SIH4 [J].
LIYANAGE, AN ;
KIMURA, M ;
OZAWA, E ;
FRIEDT, JM .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1992, 31 (12A) :3995-4001
[28]   CHEMICAL VAPOR-DEPOSITION OF DIAMOND ON SI SUBSTRATE TREATED BY USING FLUIDIZED-BED [J].
TAKARADA, T ;
TAKEZAWA, H ;
TAMURA, K ;
NAKAGAWA, N ;
KATO, K .
KAGAKU KOGAKU RONBUNSHU, 1992, 18 (01) :122-127
[29]   ANALYSIS OF THE PYROLYSIS PRODUCTS OF DIMETHYLDICHLOROSILANE IN THE CHEMICAL VAPOR-DEPOSITION OF SILICON-CARBIDE IN ARGON [J].
CAGLIOSTRO, DE ;
RICCITIELLO, SR ;
CARSWELL, MG .
JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1990, 73 (03) :607-614
[30]   Low pressure chemical vapor deposition of niobium coating on silicon carbide [J].
Liu, Qiaomu ;
Zhang, Litong ;
Cheng, Laifei ;
Liu, Jinling ;
Wang, Yiguang .
APPLIED SURFACE SCIENCE, 2009, 255 (20) :8611-8615