SILICA-BASED OPTICAL WAVE-GUIDE ON TERRACED SILICON SUBSTRATE AS HYBRID INTEGRATION PLATFORM

被引：86
作者：
YAMADA, Y
TAKAGI, A
OGAWA, I
KAWACHI, M
KOBAYASHI, M
机构：
[1] NTT Opto-electronics Laboratories, Tokai-mura
来源：
ELECTRONICS LETTERS | 1993年 / 29卷 / 05期
关键词：
OPTICAL WAVE-GUIDES; INTEGRATED OPTICS;
D O I：
10.1049/el:19930297
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A silica-based optical waveguide on a silicon substrate with terrace regions is proposed. Because the substrate is equipped with a low-loss waveguide and an optical bench at the same time, it is applicable to a hybrid integration platform.
引用
收藏
页码：444 / 446
页数：3
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