SILICA-BASED OPTICAL WAVE-GUIDE ON TERRACED SILICON SUBSTRATE AS HYBRID INTEGRATION PLATFORM

被引：86

作者：

YAMADA, Y

TAKAGI, A

OGAWA, I

KAWACHI, M

KOBAYASHI, M

机构：

[1] NTT Opto-electronics Laboratories, Tokai-mura

来源：

ELECTRONICS LETTERS | 1993年 / 29卷 / 05期

关键词：

OPTICAL WAVE-GUIDES; INTEGRATED OPTICS;

D O I：

10.1049/el:19930297

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A silica-based optical waveguide on a silicon substrate with terrace regions is proposed. Because the substrate is equipped with a low-loss waveguide and an optical bench at the same time, it is applicable to a hybrid integration platform.

引用

页码：444 / 446

页数：3

共 7 条

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