Pressure ionization: its role in metal vapour vacuum arc plasmas and ion sources

被引:35
作者
Anders, Andre [1 ]
Anders, Simone [1 ]
Foerster, Andreas [2 ]
Brown, Ian G. [1 ]
机构
[1] Univ Calif Berkeley, Lawrence Berkeley Lab, Berkeley, CA 94720 USA
[2] Humboldt Univ, Inst Theoret Phys, D-1040 Berlin, Germany
关键词
D O I
10.1088/0963-0252/1/4/006
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
In most plasmas ionization is brought about by classical ionizing collisions between panicles. In metal vapour vacuum arc plasmas and ion sources, however, pressure ionization plays an important role in determining the final ion composition. In this paper we describe the basic mechanism of pressure ionization as a collective phenomenon in non-ideal plasmas, induced mainly by the many-panicle Coulomb interaction and quantum-mechanical exchange. Then we outline the properties of the cathode spot plasmas of vacuum arc discharges. The path of the cathode material in the electron density-temperature phase diagram is considered; starting from the solid, the matter is heated, forms a liquid and then a supercritical fluid which expands explosively, driven by a very high pressure gradient. The final ion charge state distribution is produced and frozen in the transition from the dense. non-ideal plasma (where pressure ionization is dominant) to the expanded, ideal, non-equilibrium plasma. We conclude that the final ion charge state distribution depends on the thermophysical properties of the solid and liquid cathode material as well as on the electronic structure of its atoms and ions. Some consequences for the performance of the metal vapour vacuum arc ion source are discussed.
引用
收藏
页码:263 / 270
页数:8
相关论文
共 76 条
[1]  
Achtert J., 1977, Beitraege aus der Plasma Physik, V17, P419, DOI 10.1002/ctpp.19770170606
[2]  
ALTSHULER LV, 1980, ZH EKSP TEOR FIZ+, V78, P741
[3]   VACUUM-ARC CATHODE SPOT PARAMETERS FROM HIGH-RESOLUTION LUMINOSITY MEASUREMENTS [J].
ANDERS, A ;
ANDERS, S ;
JUTTNER, B ;
PURSCH, H ;
BOTTICHER, W ;
LUCK, H .
JOURNAL OF APPLIED PHYSICS, 1992, 71 (10) :4763-4770
[4]   VALIDITY-CONDITIONS FOR COMPLETE AND PARTIAL LOCAL THERMODYNAMIC-EQUILIBRIUM OF NONHYDROGENIC LEVEL SYSTEMS AND THEIR APPLICATION TO COPPER VAPOR ARCS IN VACUUM [J].
ANDERS, A ;
ANDERS, S ;
HANTZSCHE, E .
IEEE TRANSACTIONS ON PLASMA SCIENCE, 1989, 17 (05) :653-656
[5]   PULSED DYE-LASER DIAGNOSTICS OF VACUUM-ARC CATHODE SPOTS [J].
ANDERS, A ;
ANDERS, S ;
JUTTNER, B ;
BOTTICHER, W ;
LUCK, H ;
SCHRODER, G .
IEEE TRANSACTIONS ON PLASMA SCIENCE, 1992, 20 (04) :466-472
[6]   FROZEN STATE OF IONIZATION IN A CATHODIC PLASMA-JET OF A VACUUM-ARC [J].
ANDERS, S ;
ANDERS, A .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1988, 21 (01) :213-215
[8]   EFFECTS OF NON-IDEALITY AND NON-EQUILIBRIUM IN THE CATHODE SPOT PLASMA OF VACUUM ARCS [J].
ANDERS, S ;
ANDERS, A .
CONTRIBUTIONS TO PLASMA PHYSICS, 1989, 29 (4-5) :537-543
[9]   INFLUENCE OF RESIDUAL GASES ON CATHODE SPOT BEHAVIOR [J].
ANDERS, S ;
JUTTNER, B .
IEEE TRANSACTIONS ON PLASMA SCIENCE, 1991, 19 (05) :705-712
[10]  
Baksht R. B., 1973, Soviet Physics - Technical Physics, V18, P94