SOFT-X-RAY PROJECTION LITHOGRAPHY

被引：16
|
作者：
CEGLIO, NM
HAWRYLUK, AM
STEARNS, DG
GAINES, DP
ROSEN, RS
VERNON, SP
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1990年 / 8卷 / 06期
关键词：
D O I：
10.1116/1.584912
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Recent advances in x-ray optics have made possible the practical consideration of soft x-ray projection imaging for the fabrication of high density integrated circuits.
引用
收藏
页码：1325 / 1328
页数：4
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