SURFACE-ROUGHNESS INTERPRETATION OF ELLIPSOMETER MEASUREMENTS USING GENERALIZED MAXWELL GARNETT THEORY

被引：28

作者：

MARTON, JP

CHAN, EC

机构：

[1] WELWYN CANADA LTD,1255 BRYDGES ST,LONDON,ONTARIO,CANADA

[2] MCMASTER UNIV,INST MAT RES,HAMILTON,ONTARIO,CANADA

[3] UNIV WESTERN ONTARIO,FAC ENGN SCI,LONDON,ONTARIO,CANADA

来源：

JOURNAL OF APPLIED PHYSICS | 1974年 / 45卷 / 11期

关键词：

D O I：

10.1063/1.1663174

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：5008 / 5014

页数：7

共 11 条

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[2] GENERALIZED MAXWELL GARNETT EQUATIONS FOR ROUGH SURFACES [J].

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CHAN, EC ;

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[4] INFLUENCE OF SURFACE-ROUGHNESS ON TRANSMISSION AND REFLECTANCE SPECTRA OF ADSORBED SPECIES [J].

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[5] EFFECTS OF VACUUM DEPOSITION CONDITIONS ON ELLIPSOMETRIC PARAMETERS, OPTICAL-CONSTANTS, AND REFLECTANCE OF ULTRAPURE ALUMINUM FILMS [J].

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CHIN, FK ;

NORMAN, JE .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1973, 63 (07) :786-792

[6]

HEAVENS OS, 1965, OPTICAL PROPERTIES T, P93

[7]

Jackson J. D., 1962, CLASSICAL ELECTRODYN

[8] INTERPRETATION OF ELLIPSOMETRIC OBSERVATIONS OF ABSORBED OXYGEN IN NIOBIUM [J].

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BELLINA, JJ .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1970, 60 (12) :1697-+

[9] ELLIPSOMETRIC STUDY OF NI-P FILM SURFACES [J].

MARTON, JP ;

CHAN, EC .

JOURNAL OF APPLIED PHYSICS, 1972, 43 (04) :1681-&

[10] MEASUREMEMT OF THICKNESS AND REFRACTIVE INDEX OF VERY THIN FILMS AND OPTICAL PROPERTIES OF SURFACES BY ELLIPSOMETRY [J].

MCCRACKIN, FL ;

PASSAGLIA, E ;

STROMBERG, RR ;

STEINBERG, HL .

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