INTERFERENCE EFFECTS IN X-RAY DOUBLE-CRYSTAL ROCKING CURVES OF GEXSI1-X/SI SUPERLATTICES

被引：0
作者：
LI, JH
MAI, ZH
CUI, SF
机构：
[1] Institute of Physics, Chinese Academy of Sciences, Beijing 100080
来源：
JOURNAL OF APPLIED PHYSICS | 1994年 / 76卷 / 02期
关键词：
D O I：
10.1063/1.357794
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Interference effects in the x-ray double-crystal rocking curves of GexSi1-x/Si strained-layer superlattices have been simulated based on the x-ray dynamical scattering theory. We found that the A1BA2 type of structure due to unstable growth conditions causes a series of strong oscillation fringes beside the superlattice reflection satellite peaks. The positions and intensities of these oscillation fringes with respect to the superlattice satellite peaks are strongly correlated to the number of periods in the subsuperlattice layer B and the relative mean lattice mismatch between A and B with respect to the substrate.
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页码：1320 / 1322
页数：3
相关论文
共 6 条
[1]   DETECTION OF THE ACTIVE LAYER OF AIIIBV SEMICONDUCTOR QUANTUM-WELL STRUCTURES BY HIGH-RESOLUTION X-RAY-DIFFRACTOMETRY [J].
BAUMBACH, GT ;
RHAN, H ;
PIETSCH, U .
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1988, 109 (01) :K7-K10
[2]   DOUBLE CRYSTAL X-RAY ROCKING CURVES OF MULTIPLE LAYER STRUCTURES [J].
CHU, X ;
TANNER, BK .
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1987, 2 (12) :765-771
[3]   INTERFERENCE PEAKS IN DOUBLE-CRYSTAL X-RAY ROCKING CURVES OF LASER STRUCTURES [J].
CHU, X ;
TANNER, BK .
APPLIED PHYSICS LETTERS, 1986, 49 (26) :1773-1775
[4]   INTERFERENCE EFFECTS IN X-RAY DOUBLE-CRYSTAL ROCKING CURVES OF GA1-XALXAS/GAAS LASER STRUCTURES AND SUPERLATTICES [J].
FRANZOSI, P ;
JENICHEN, B .
JOURNAL OF APPLIED PHYSICS, 1991, 70 (01) :499-501
[5]  
SHUFAN C, 1990, J APPL CRYSTALLOGR, V23, P147
[6]   INTERFERENCE STRUCTURES IN DOUBLE-CRYSTAL X-RAY ROCKING CURVES FROM VERY THIN MULTIPLE EPITAXIAL LAYERS [J].
TANNER, BK ;
HALLIWELL, MAG .
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1988, 3 (10) :967-972
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