DETECTION OF STRUCTURAL DEFECTS IN GAAS BY ELECTROCHEMICAL ETCHING

被引：46
作者：
FAKTOR, MM
STEVENSON, JL
机构：
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1978年 / 125卷 / 04期
关键词：
D O I：
10.1149/1.2131512
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：621 / 629
页数：9
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