SURFACE AND BULK DEFECTS IN HYDROGENATED AMORPHOUS-SILICON AND SILICON-BASED ALLOY-FILMS

被引：47
作者：
SHIMIZU, T
XU, XX
KIDOH, H
MORIMOTO, A
KUMEDA, M
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1988年 / 64卷 / 10期
关键词：
D O I：
10.1063/1.342458
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：5045 / 5049
页数：5
相关论文
共 11 条
[1]  
CHEN GH, 1984, CHINESE PHYS, V4, P13
[2]   STUDY OF SURFACE-INTERFACE AND BULK DEFECT DENSITY IN A-SI-H BY MEANS OF PHOTOTHERMAL DEFLECTION SPECTROSCOPY AND PHOTOCONDUCTIVITY [J].
FAVRE, M ;
CURTINS, H ;
SHAH, AV .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1987, 97-8 :731-734
[3]   THICKNESS DEPENDENCES OF PROPERTIES OF P-DOPED AND B-DOPED HYDROGENATED AMORPHOUS-SILICON .2. ELECTRON-SPIN-RESONANCE, HYDROGEN VIBRATIONAL-SPECTRA AND OPTICAL-ABSORPTION [J].
HASEGAWA, S ;
SHIMIZU, S ;
KURATA, Y .
PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1984, 49 (05) :521-532
[4]   THICKNESS DEPENDENCES OF PROPERTIES OF P-DOPED AND B-DOPED HYDROGENATED AMORPHOUS-SILICON .1. DARK CONDUCTIVITY AND PHOTOCONDUCTIVITY [J].
HASEGAWA, S ;
SHIMIZU, S ;
KURATA, Y .
PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1984, 49 (05) :511-519
[5]   OPTICAL-ABSORPTION SPECTRA OF SURFACE OR INTERFACE STATES IN HYDROGENATED AMORPHOUS-SILICON [J].
JACKSON, WB ;
BIEGELSEN, DK ;
NEMANICH, RJ ;
KNIGHTS, JC .
APPLIED PHYSICS LETTERS, 1983, 42 (01) :105-107
[6]   OPTICALLY INDUCED ELECTRON-SPIN RESONANCE IN DOPED AMORPHOUS SILICON [J].
KNIGHTS, JC ;
BIEGELSEN, DK ;
SOLOMON, I .
SOLID STATE COMMUNICATIONS, 1977, 22 (02) :133-137
[7]  
SHIMIZU T, IN PRESS MATERIALS R, V118
[8]   PHOTOTHERMAL AND PHOTOCONDUCTIVE DETERMINATION OF SURFACE AND BULK DEFECT DENSITIES IN AMORPHOUS-SILICON FILMS [J].
SMITH, ZE ;
CHU, V ;
SHEPARD, K ;
ALJISHI, S ;
SLOBODIN, D ;
KOLODZEY, J ;
WAGNER, S ;
CHU, TL .
APPLIED PHYSICS LETTERS, 1987, 50 (21) :1521-1523
[9]   DENSITY OF THE GAP STATES IN UNDOPED AND DOPED GLOW-DISCHARGE A-SI-H [J].
VANECEK, M ;
KOCKA, J ;
STUCHLIK, J ;
KOZISEK, Z ;
STIKA, O ;
TRISKA, A .
SOLAR ENERGY MATERIALS, 1983, 8 (04) :411-423
[10]   THERMAL-EQUILIBRIUM PROCESS IN UNDOPED HYDROGENATED AMORPHOUS-SILICON AND SILICON-CARBON ALLOY-FILMS [J].
XU, XX ;
MORIMOTO, AH ;
KUMEDA, MR ;
SHIMIZU, TS .
APPLIED PHYSICS LETTERS, 1988, 52 (08) :622-624
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