CALCULATIONS OF DOSE ENHANCEMENT IN DEVICE STRUCTURES

被引：4
作者：
GARTH, JC
机构：
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1989年 / 40-1卷
关键词：
D O I：
10.1016/0168-583X(89)90635-6
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：1266 / 1270
页数：5
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[9]  
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