DYNAMIC-MODEL FOR PSEUDOMORPHIC STRUCTURES GROWN ON COMPLIANT SUBSTRATES - AN APPROACH TO EXTEND THE CRITICAL THICKNESS

被引:46
作者
TENG, D
LO, YH
机构
[1] Cornell University, School of Electrical Engineering, Ithaca
关键词
D O I
10.1063/1.108813
中图分类号
O59 [应用物理学];
学科分类号
摘要
We use a dynamic model to analyze the critical thickness for pseudomorphic structures grown on thin membranes considering the strain relaxation process. Our results show that a pseudomorphic structure of arbitrary thickness can be achieved on a semiconductor membrane which works as a compliant substrate. The analysis on GaAs/InGaAs material system shows that the membrane should be thinner than 1200 angstrom for 1% strain and 1 mum for 0.5% strain. Such thickness can be achieved by existing technology. Using the proposed method, semiconductor lasers of yellow and green colors, among many new devices, can be fabricated with strained InGaP/InAlGaP active and cladding layers on GaAs substrates.
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页码:43 / 45
页数:3
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