THE ROLE OF SURFACE AND GAS-PHASE REACTIONS IN ATOMIC LAYER EPITAXY

被引：0
|
作者：
DAPKUS, PD
DENBAARS, SP
CHEN, QS
MAA, BY
机构：
来源：
MECHANISMS OF REACTIONS OF ORGANOMETALLIC COMPOUNDS WITH SURFACES | 1989年 / 198卷
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中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
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页码：257 / 266
页数：10
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