SURFACE COMPOSITION ANALYSIS BY BINARY SCATTERING OF NOBLE GAS IONS

被引：52
作者：
GOFF, RF
SMITH, DP
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1970年 / 7卷 / 01期
关键词：
D O I：
10.1116/1.1315833
中图分类号：
O59 [应用物理学];
学科分类号：
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页码：72 / +
页数：1
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