HIGH-CURRENT SPUTTERING ION-SOURCE FOR REFRACTORY-METALS

被引：6

作者：

KANTER, M

机构：

[1] Soreq Nuclear Research Centers, Yavne

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1992年 / 70卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(92)95931-G

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The Chavet-Bernas ion source of the MEIRA isotope separator has been modified to a gas sputtering source for the production of intense refractory metal ion beams. The source has produced a molybdenum ion current of 8 mA; the ratio of this current to the total current, including the argon carrier, is 0.46. A metal ion density of 5.8 mA/cm2 has been achieved at the source from an emitting area of 55 x 2.5 mm2. This ion density is significantly higher than the figures which have been reported for such sources.

引用

页码：200 / 204

页数：5

共 9 条

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