HIGH-CURRENT SPUTTERING ION-SOURCE FOR REFRACTORY-METALS

被引：6
|
作者：
KANTER, M
机构：
[1] Soreq Nuclear Research Centers, Yavne
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1992年 / 70卷 / 1-4期
关键词：
D O I：
10.1016/0168-583X(92)95931-G
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
The Chavet-Bernas ion source of the MEIRA isotope separator has been modified to a gas sputtering source for the production of intense refractory metal ion beams. The source has produced a molybdenum ion current of 8 mA; the ratio of this current to the total current, including the argon carrier, is 0.46. A metal ion density of 5.8 mA/cm2 has been achieved at the source from an emitting area of 55 x 2.5 mm2. This ion density is significantly higher than the figures which have been reported for such sources.
引用
收藏
页码：200 / 204
页数：5
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