GROWTH OF SULFIDE FILMS ON INP BY PLASMA SULFIDATION

被引：17

作者：

GENDRY, M ^{[1
]}

DURAND, J ^{[1
]}

COT, L ^{[1
]}

HOLLINGER, G ^{[1
]}

机构：

[1] UNIV LYON 1,INST PHYS NUCL,F-69622 VILLEURBANNE,FRANCE

来源：

THIN SOLID FILMS | 1987年 / 149卷 / 03期

关键词：

D O I：

10.1016/0040-6090(87)90394-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：313 / 324

页数：12

共 12 条

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