CONVOLUTION AND DECONVOLUTION IN AUGER-ELECTRON SPECTROSCOPY, WITH APPLICATION TO SILICON

被引：14
作者：
ONSGAARD, JH [1 ]
MORGEN, P [1 ]
CREASER, RP [1 ]
机构：
[1] PHILLIP COLLEGE,WODEN 2600,ACT,AUSTRALIA
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1978年 / 15卷 / 01期
关键词：
D O I：
10.1116/1.569435
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：44 / 49
页数：6
相关论文
共 24 条
[1]   BAND STRUCTURE OF SILICON BY CHARACTERISTIC AUGER ELECTRON SPECTRUM ANALYSIS [J].
AMELIO, GF .
SURFACE SCIENCE, 1970, 22 (02) :301-&
[2]  
BAUER E, 1975, INTERACTIONS METAL S, pCH6
[3]  
BAUER E, 1975, INTERACTIONS METAL S, P232
[4]  
BROWN KM, 1972, NUMER MATH, V18, P289
[5]   ELUCIDATION OF SURFACE-STRUCTURE AND BONDING BY PHOTOELECTRON-SPECTROSCOPY [J].
BRUNDLE, CR .
SURFACE SCIENCE, 1975, 48 (01) :99-136
[6]   THEORY OF VALENCE-BAND AUGER LINE-SHAPES - IDEAL SI(111), (100), AND (110) [J].
FEIBELMAN, PJ ;
MCGUIRE, EJ ;
PANDEY, KC .
PHYSICAL REVIEW B, 1977, 15 (04) :2202-2216
[7]   AUGER ELECTRON SPECTROSCOPY OF SI [J].
GRANT, JT ;
HAAS, TW .
SURFACE SCIENCE, 1970, 23 (02) :347-&
[8]  
GREVILLE TNE, 1967, MATHEMATICAL METHODS, V2, P156
[9]   INTERRELATION OF PHYSICS AND MATHEMATICS IN ION-NEUTRALIZATION SPECTROSCOPY [J].
HAGSTRUM, HD ;
BECKER, GE .
PHYSICAL REVIEW B, 1971, 4 (12) :4187-&
[10]   ENERGY-LEVEL SPECTRA OF ELECTRONS AT (111), (110), AND (100) SURFACES OF SILICON AND GERMANIUM BY ION-NEUTRALIZATION SPECTROSCOPY [J].
HAGSTRUM, HD ;
BECKER, GE .
PHYSICAL REVIEW B, 1973, 8 (04) :1580-1591
123