CONVOLUTION AND DECONVOLUTION IN AUGER-ELECTRON SPECTROSCOPY, WITH APPLICATION TO SILICON

被引：14
|
作者：
ONSGAARD, JH [1 ]
MORGEN, P [1 ]
CREASER, RP [1 ]
机构：
[1] PHILLIP COLLEGE,WODEN 2600,ACT,AUSTRALIA
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1978年 / 15卷 / 01期
关键词：
D O I：
10.1116/1.569435
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：44 / 49
页数：6
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