SCANNING ELECTRON-DIFFRACTION STUDY OF VAPOR-DEPOSITED AND ION-IMPLANTED THIN-FILMS OF GE (I)

被引:56
|
作者
GRACZYK, JF [1 ]
CHAUDHARI, P [1 ]
机构
[1] IBM CORP, THOMAS J WATSON RES CTR, YORKTOWN HTS, NY USA
来源
关键词
D O I
10.1002/pssb.2220580116
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
引用
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页码:163 / 179
页数:17
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