ELECTROSTATICALLY DRIVEN VACUUM-ENCAPSULATED POLYSILICON RESONATORS .1. DESIGN AND FABRICATION

被引：165

作者：

LEGTENBERG, R ^{[1
]}

TILMANS, HAC ^{[1
]}

机构：

[1] UNIV TWENTE,MESA RES INST,7500 AE ENSCHEDE,NETHERLANDS

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1994年 / 45卷 / 01期

关键词：

ELECTROSTATIC EXCITATION AND DETECTION; SURFACE-MICROMACHINING TECHNIQUES; POLYSILICON RESONATORS; VACUUM ENCAPSULATION;

D O I：

10.1016/0924-4247(94)00812-4

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Basic design issues and a fabrication process based on surface-micromachining techniques for electrostatically driven vacuum-encapsulated polysilicon resonators are presented. A novel freeze-drying method that does not require vacuum equipment is presented. Reactive sealing with LPCVD silicon nitride is used to create the evacuated cavity, resulting in cavity pressures close to the deposition pressure. Design issues regarding choice of materials, technology and layout are discussed. First experimental results, including an admittance plot of the one-port resonator and a plot indicating the dependence of the Q-factor on the resonator geometry and ambient pressure, are presented.

引用

页码：57 / 66

页数：10

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