MAGNETIC-PERMEABILITY OF SPUTTERED PERMALLOY THIN-FILMS

被引：4

作者：

DIMITROV, D

HALIANOV, I

KASSABOV, J

MARINOV, S

机构：

[1] Inst. of Solid State Phys., Bulgarian Acad. of Sci., Sofia

来源：

JOURNAL OF PHYSICS-CONDENSED MATTER | 1993年 / 5卷 / 09期

关键词：

D O I：

10.1088/0953-8984/5/9/010

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

The magnetic permeability of sputtered permalloy thin layers has been investigated by a specially designed experimental set-up. The investigation shows that the magnetic permeability depends strongly on the argon pressure during deposition. Higher permeability of the sputtered layers is obtained for argon at pressure less than 5 x 10(-2) mbar.

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页码：1257 / 1260

页数：4

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