DISPLACEMENT SENSOR USING CHANNELED SPECTRUM DISPERSED ON A LINEAR CCD ARRAY

被引：23

作者：

TAPLIN, S ^{[1
]}

PODOLEANU, AG ^{[1
]}

WEBB, DJ ^{[1
]}

JACKSON, DA ^{[1
]}

机构：

[1] TECH UNIV POLITECHN,DEPT PHYS,R-77206 BUCHAREST,ROMANIA

来源：

ELECTRONICS LETTERS | 1993年 / 29卷 / 10期

关键词：

OPTICAL SENSORS; MEASUREMENT;

D O I：

10.1049/el:19930598

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A novel form of low coherence interferometric sensor is described. The channelled spectrum produced by illuminating a sensing interferometer with a broadband source is analysed directly using a CCD array. The system currently provides unambiguous measurement over a range of 1.5mm with an accuracy of better than 6 mum.

引用

页码：896 / 897

页数：2