PREPARATION OF A HIGH-JC Y-BA-CU-O FILM AT 700-DEGREES-C BY THERMAL CHEMICAL VAPOR-DEPOSITION

A high-J(c) Y-Ba-Cu-O superconducting film was successfully prepared at 700-degrees-C on a SrTiO3 (100) single-crystal substrate without postannealing by thermal chemical vapor deposition under a low-oxygen partial pressure of 0.036 Torr in the total gas introduced into a hot-wall-type reactor (total gas pressure: 10 Torr), using 1% O2 balanced with Ar as a reactant gas. The sources for the elements of Ba, Y, and Cu were beta-diketone metal chelates. The film mainly consisted of YBa2Cu3Ox with c-axis orientation perpendicular to the substrate plane and included small amounts of a-axis oriented and randomly oriented grains. The film showed the superconducting transition temperature defined by zero resistivity at 89 K. The critical current density based on a 2-mu-V/cm criterion was 2.2 X 10(6) A/cm2 at 77.3 K and 0 T.