FUTURE VERY-LARGE-SCALE INTEGRATION TECHNOLOGY

被引：0
作者：
HIROSE, M [1 ]
机构：
[1] HIROSHIMA UNIV,INTEGRATED SYST RES CTR,HIROSHIMA 724,JAPAN
来源：
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 1988年 / 1卷 / 3-4期
关键词：
D O I：
10.1016/0921-5107(88)90001-3
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：213 / 220
页数：8
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