FUTURE VERY-LARGE-SCALE INTEGRATION TECHNOLOGY

被引：0

|

作者：

HIROSE, M ^{[1
]}

机构：

[1] HIROSHIMA UNIV,INTEGRATED SYST RES CTR,HIROSHIMA 724,JAPAN

来源：

MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 1988年 / 1卷 / 3-4期

关键词：

D O I：

10.1016/0921-5107(88)90001-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：213 / 220

页数：8

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