MORPHOLOGICAL TRANSITION OF INAS ISLANDS ON GAAS(001) UPON DEPOSITION OF A GAAS CAPPING LAYER

被引:33
作者
LIN, XW [1 ]
WASHBURN, J [1 ]
LILIENTALWEBER, Z [1 ]
WEBER, ER [1 ]
SASAKI, A [1 ]
WAKAHARA, A [1 ]
NABETANI, Y [1 ]
机构
[1] KYOTO UNIV,DEPT ELECT ENGN,KYOTO 60601,JAPAN
关键词
D O I
10.1063/1.112883
中图分类号
O59 [应用物理学];
学科分类号
摘要
The interaction between a GaAs cap and InAs islands grown on vicinal GaAs(001) has been studied by transmission electron microscopy and atomic force microscopy. Samples were prepared by molecular beam epitaxy at 480 degrees C. Upon GaAs cap deposition, it was found that the previously grown InAs islands undergo a novel type of morphological transition, i.e., a transition from disk-shaped to ring-shaped islands. InAs becomes depleted or entirely absent in the central area of what had been a disk-shaped InAs island. The GaAs cap was also shown to be virtually absent within the same central region, resulting in the formation of crater-like surface depressions.
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页码:1677 / 1679
页数:3
相关论文
共 15 条
[1]   ANISOTROPIC LATERAL GROWTH IN GAAS MOCVD LAYERS ON (001) SUBSTRATES [J].
ASAI, H .
JOURNAL OF CRYSTAL GROWTH, 1987, 80 (02) :425-433
[2]   SURFACTANTS IN EPITAXIAL-GROWTH [J].
COPEL, M ;
REUTER, MC ;
KAXIRAS, E ;
TROMP, RM .
PHYSICAL REVIEW LETTERS, 1989, 63 (06) :632-635
[3]   DISLOCATION-FREE STRANSKI-KRASTANOW GROWTH OF GE ON SI(100) [J].
EAGLESHAM, DJ ;
CERULLO, M .
PHYSICAL REVIEW LETTERS, 1990, 64 (16) :1943-1946
[4]   GROWTH BY MOLECULAR-BEAM EPITAXY AND CHARACTERIZATION OF INAS/GAAS STRAINED-LAYER SUPERLATTICES [J].
GOLDSTEIN, L ;
GLAS, F ;
MARZIN, JY ;
CHARASSE, MN ;
LEROUX, G .
APPLIED PHYSICS LETTERS, 1985, 47 (10) :1099-1101
[5]   MECHANISM FOR THE FORMATION OF 90-DEGREES DISLOCATIONS IN HIGH-MISMATCH-(100) SEMICONDUCTOR STRAINED-LAYER SYSTEMS [J].
GOSLING, TJ .
JOURNAL OF APPLIED PHYSICS, 1993, 74 (09) :5415-5420
[6]   DELAYED RELAXATION BY SURFACTANT ACTION IN HIGHLY STRAINED III-V SEMICONDUCTOR EPITAXIAL LAYERS [J].
GRANDJEAN, N ;
MASSIES, J ;
ETGENS, VH .
PHYSICAL REVIEW LETTERS, 1992, 69 (05) :796-799
[7]   SEGREGATION AND INTERDIFFUSION OF IN ATOMS IN GAAS/INAS/GAAS HETEROSTRUCTURES [J].
KAWAI, T ;
YONEZU, H ;
OGASAWARA, Y ;
SAITO, D ;
PAK, K .
JOURNAL OF APPLIED PHYSICS, 1993, 74 (03) :1770-1775
[8]   DIRECT FORMATION OF QUANTUM-SIZED DOTS FROM UNIFORM COHERENT ISLANDS OF INGAAS ON GAAS-SURFACES [J].
LEONARD, D ;
KRISHNAMURTHY, M ;
REAVES, CM ;
DENBAARS, SP ;
PETROFF, PM .
APPLIED PHYSICS LETTERS, 1993, 63 (23) :3203-3205
[9]  
LIN XW, 1994, J VAC SCI TECHNOL B, V12
[10]   SURFACE SEGREGATION OF IN ATOMS DURING MOLECULAR-BEAM EPITAXY AND ITS INFLUENCE ON THE ENERGY-LEVELS IN INGAAS/GAAS QUANTUM-WELLS [J].
MURAKI, K ;
FUKATSU, S ;
SHIRAKI, Y ;
ITO, R .
APPLIED PHYSICS LETTERS, 1992, 61 (05) :557-559