DIFFUSION OF PHOSPHORUS IN SILICON DIOXIDE FROM A SPIN-ON SOURCE

被引：5
|
作者：
KUISL, M
SASSE, E
机构：
来源：
THIN SOLID FILMS | 1980年 / 65卷 / 03期
关键词：
D O I：
10.1016/0040-6090(80)90247-3
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：373 / 380
页数：8
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