SPUTTERING ION-SOURCE WITH SIMULTANEOUS USE OF MICROWAVE AND PENNING-IONIZATION-GAUGE DISCHARGE

被引：4

作者：

YOSHIDA, Y ^{[1
]}

OHNISHI, T ^{[1
]}

HIROFUJI, Y ^{[1
]}

IKEDA, T ^{[1
]}

机构：

[1] MATSUSHITA ELECT IND CO LTD,MORIGUCHI,OSAKA 570,JAPAN

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1990年 / 61卷 / 01期

关键词：

D O I：

10.1063/1.1141929

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Characteristics of Penning-ionization-gauge-type compact microwave metal-ion source are described. This ion source can operate with two different discharge modes: the positive-resistance region mode and the negative-resistance region mode. In the positive-resistance region, a normalized emittance of a Ta+-ion beam is 1.8×10-7 m rad, the plasma density is 4×1012 cm-3, and the electron temperature is about 6 eV. In the negative-resistance region, the emittance is 2.7×10-7 m rad. This ion source is suitable for operation in the positive-resistance region where the microwave discharge is dominant.

引用

页码：598 / 600

页数：3

共 8 条

[1]

ISHIKAWA J, 1986, ION GEN KOUGAKU, P313

[2] POSSIBLE EMITTANCE INCREASE THROUGH FILAMENTATION DUE TO SPACE CHARGE IN CONTINUOUS BEAMS [J].

LAPOSTOLLE, PM .

IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1971, NS18 (03) :1101-+

[3]

SEPTIER A, 1967, FOCUSING CHARGED PAR, P150

[4] PIG-TYPE COMPACT MICROWAVE METAL-ION SOURCE [J].

YOSHIDA, Y ;

SUZUKI, N ;

ONISHI, T ;

HIROFUJI, Y .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1987, 26 (02) :L100-L102

[5] LOW-ENERGY DOUBLE-ION-BEAM DEPOSITION SYSTEM [J].

YOSHIDA, Y ;

OHNISHI, T ;

SEKIHARA, T ;

HIROFUJI, Y .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1988, 27 (01) :140-143

[6] CHARACTERISTICS OF PENNING IONIZATION GAUGE TYPE COMPACT MICROWAVE METAL-ION SOURCE [J].

YOSHIDA, Y ;

OHNISHI, T ;

HIROFUJI, Y .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (04) :2451-2456

[7]

YOSHIDA Y, 1987, 6TH P INT C PROD ENG, P709

[8]

YOSHIDA Y, 1987, 11TH P S ION SOURC I, P29

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