INFLUENCE OF THE BEAM SPOT SIZE ON ABLATION RATES IN PULSED-LASER PROCESSING

被引：84
作者：
EYETT, M
BAUERLE, D
机构：
[1] Angewandte Physik, Johannes-Kepler-Universität Linz
来源：
APPLIED PHYSICS LETTERS | 1987年 / 51卷 / 24期
关键词：
D O I：
10.1063/1.98290
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Ablation rates in pulsed-laser processing depend heavily on the laser beam spot size. This has been observed for the first time for a number of different materials. Detailed investigations on this effect, performed by means of XeCl excimer-laser radiation and the example of LiNbO3, are reported in this letter. With this material, the ablation rate at constant fluence saturates at laser beam spot sizes of 2w≳80 μm and increases by about a factor of 3 when 2w is decreased to 24 μm. The effect is interpreted as being due to changes in the material transport which depend on the size of the region being processed.
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页码：2054 / 2055
页数：2
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