SCANNING-X-RAY MICROPROBE WITH BRAGG-FRESNEL MULTILAYER LENS

被引：0

作者：

CHEVALLIER, P

DHEZ, P

LEGRAND, F

ERKO, A

VIDAL, B

机构：

[1] RUSSIAN ACAD SCI,INST MICROELECTR TECHNOL,CHERNOGOLOVKA 142432,RUSSIA

[2] FAC SCI & TECH ST JEROME,LOE,F-13397 MARSEILLE,FRANCE

来源：

INSTITUTE OF PHYSICS CONFERENCE SERIES | 1993年 / 130期

关键词：

D O I：

暂无

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

The preliminary design of a fluorescence X-Ray scanning microprobe with submicron resolution was tested at the LURE (France). A linear multilayer Bragg- Fresnel lens has been used for vertical focussing of the white X-ray synchrotron beam. In the energy range 6Kev to 14KeV, and with a bandwidth of deltalambda/lambda almost-equal-to 10(-2), the vertical spot size checked with a photographic plate was 1.7 mum. At 10KeV input photon energy the Ni(Ka) fluorescence signal registered during a knife-edge test with a test object shows a 3 mum resolution.

引用

页码：617 / 620

页数：4

共 9 条

[1]

AGAFONOV YA, 1992, IN PRESS MULTILAYER

[2]

Aristov V.V., 1991, XRAY OPTICS

[3]

CHEVALLIER P, 1990, 3D P C XRAY MICR LON

[4]

Erko A I, 1990, J Xray Sci Technol, V2, P297, DOI 10.3233/XST-1990-2405

[5]

Henke B. L., 1982, Atomic Data and Nuclear Data Tables, V27, P1, DOI 10.1016/0092-640X(82)90002-X

[6] SCANNING X-RAY MICROSCOPE USING SYNCHROTRON RADIATION [J].

HOROWITZ, P .

SCIENCE, 1972, 178 (4061) :608-&

[7] PHASE ZONE PLATES FOR X-RAYS AND EXTREME UV [J].

KIRZ, J .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1974, 64 (03) :301-309

[8]

SPARKS CJ, 1989, MATER RES SOC S P, V143, P223

[9] A TUNABLE X-RAY MICROPROBE USING SYNCHROTRON RADIATION [J].

WU, Y ;

THOMPSON, AC ;

UNDERWOOD, JH ;

GIAUQUE, RD ;

CHAPMAN, K ;

RIVERS, ML ;

JONES, KW .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1990, 291 (1-2) :146-151

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