THE CALCULATION OF THE IMPEDANCE OF AN INDUCTION PLASMA INSTALLATION BY A HYBRID FINITE-ELEMENT BOUNDARY-ELEMENT METHOD

被引：11
|
作者：
FOULADGAR, J
CHENTOUF, A
机构：
[1] Laboratoire de Recherche de Techniques Inductives (L.R.T.I)
来源：
IEEE TRANSACTIONS ON MAGNETICS | 1993年 / 29卷 / 06期
关键词：
D O I：
10.1109/20.280977
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A hybrid FE-BE analysis in a RF induction plasma is developed to predict the current distribution in the inductor and the plasma and to calculate the impedance of the whole installation. The electromagnetic and heat transfer equations are solved by the FE method inside the plasma and the BE method is used to calculate the boundary conditions. To preserve the sparse and positive definite matrix structure of the FE method, an iterative algorithm is used to solve the coupled matrix equations.
引用
收藏
页码：2479 / 2481
页数：3
相关论文
共 50 条
12345